Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

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ژورنال

عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines

سال: 2003

ISSN: 1341-8939,1347-5525

DOI: 10.1541/ieejsmas.123.510